IEEE International Interconnect Technology Conference (IITC 2020) is dedicated to technology advances in the fields such as: semiconductor processing, equipment development, advanced materials and interconnect systems.
The IEEE International Interconnect Technology Conference (IITC 2020) covers topics such as:
Materials and Unit Processes: dielectrics, metals, barriers, wet, CMP, PVD, CVD, ALD, selective deposition/SAMs
Process integration, advanced patterning for MOL/BEOL
Advanced characterization: material analysis, analytical techniques, process modelling, defectivity, EPE
Reliability and Failure analysis, techniques and methods