SPIE Advanced Lithography 2020 Conference & Exhibition

  • 23-27 February 2020
  • San Jose McEnery Convention Center, CA, United States

SPIE Advanced Lithography 2020 Conference & Exhibition is dedicated to research and development in resists, optical lithography, EUV, metrology, double patterning, immersion, imprint lithography and DFM.

SPIE Advanced Lithography 2020 Conference & Exhibition covers topics such as:

  • Alternative Lithographic Technologies
  • Extreme Ultraviolet (EUV) Lithography
  • Advances in Resist Materials and Processing Technology
  • Metrology, Inspection, and Process Control for Microlithography
  • Design for Manufacturability through Design-Process Integration
  • Optical Microlithography
  • Technical short courses on topics ranging from lithography fundamentals to emerging approaches including Directed Self Assembly (DSA) and EUV lithography

The exhibition covers the latest technology in advanced lithography, including:

  • Metrology, inspection, OPC, and process control
  • Lithography: double patterning, immersion, EUV, e-beam, RET and optical/laser
  • Materials and chemicals
  • Design and manufacturing software
  • Lasers
  • Imaging equipment
  • Nano-imprint
  • Resist materials and processing
  • Nanoscale imaging
  • IC and chip fabrication

SPIE Advanced Lithography 2020 Conference & Exhibition brings together more than 4,000 attendees and about 50 exhibitors, representing researchers and managers working in the lithography industry, semiconductor suppliers, integrators, and manufacturers.

SPIE Advanced Lithography 2020 Conference & Exhibition will be held in San Jose, CA, United States on 23-27 February 2020.

Venue

San Jose McEnery Convention Center
150 West San Carlos St. ,
San Jose,
California,
United States
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Booking.com
360-885 US Dollar
Free
SPIE - The International Society for Optics and Photonics
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Future Events

  • SPIE Advanced Lithography 2020 Conference & Exhibition - 23-27 Feb 2020, San Jose McEnery Convention Center, San Jose, United States (55878)
  • SPIE Advanced Lithography 2021 Conference & Exhibition - Feb 2021, San Jose McEnery Convention Center, San Jose, United States (16101)

Past Events

  • SPIE Advanced Lithography 2019 Conference & Exhibition - 24-28 Feb 2019, San Jose McEnery Convention Center, San Jose, United States (30497)

Important

Please, check the official conference website for possible changes, before you make any traveling arrangements

Prices are for evaluation only.