SPIE Advanced Lithography 2020 Conference & Exhibition

  • 23-27 February 2020
  • San Jose McEnery Convention Center, CA, United States

SPIE Advanced Lithography 2020 Conference & Exhibition is dedicated to research and development in resists, optical lithography, EUV, metrology, double patterning, immersion, imprint lithography and DFM.

SPIE Advanced Lithography 2020 Conference & Exhibition covers topics such as:

  • Alternative Lithographic Technologies
  • Extreme Ultraviolet (EUV) Lithography
  • Advances in Resist Materials and Processing Technology
  • Metrology, Inspection, and Process Control for Microlithography
  • Design for Manufacturability through Design-Process Integration
  • Optical Microlithography
  • Technical short courses on topics ranging from lithography fundamentals to emerging approaches including Directed Self Assembly (DSA) and EUV lithography

The exhibition covers the latest technology in advanced lithography, including:

  • Metrology, inspection, OPC, and process control
  • Lithography: double patterning, immersion, EUV, e-beam, RET and optical/laser
  • Materials and chemicals
  • Design and manufacturing software
  • Lasers
  • Imaging equipment
  • Nano-imprint
  • Resist materials and processing
  • Nanoscale imaging
  • IC and chip fabrication

SPIE Advanced Lithography 2020 Conference & Exhibition brings together more than 4,000 attendees and about 50 exhibitors, representing researchers and managers working in the lithography industry, semiconductor suppliers, integrators, and manufacturers.

SPIE Advanced Lithography 2020 Conference & Exhibition will be held in San Jose, CA, United States on 23-27 February 2020.

Venue

San Jose McEnery Convention Center
150 West San Carlos St. ,
San Jose,
California,
United States
  View all Hotels near Venue
Booking.com
360-885 US Dollar
Free
SPIE - The International Society for Optics and Photonics
Rentalcars Savings

Past and Future Events

  • SPIE Advanced Lithography 2021 Conference & Exhibition - Feb 2021, San Jose, United States (16101)
  • SPIE Advanced Lithography 2020 Conference & Exhibition - 23-27 Feb 2020, San Jose, United States (55878)
  • SPIE Advanced Lithography 2019 Conference & Exhibition - 24-28 Feb 2019, San Jose, United States (30497)

Important

Please, check the official conference website for possible changes, before you make any traveling arrangements

Prices are for evaluation only.