SPIE Advanced Lithography + Patterning

  • 26 Feb - 02 Mar, 2023
  • San Jose McEnery Convention Center, CA, United States


SPIE Advanced Lithography + Patterning is a conference and exhibition that addresses the challenges presented in optical and EUV lithography, metrology, patterning technologies, and process integration for semiconductor manufacturing and covers topics such as:

  • DTCO and Computational Patterning
  • Optical and EUV Nanolithography
  • Novel Patterning Technologies
  • Metrology, Inspection, and Process Control
  • Advanced Etch Technology and Process Integration for Nanopatterning
  • Advances in Patterning Materials and Processes

SPIE Advanced Lithography + Patterning brings together the lithography community, including researchers and managers working in the lithography industry.

SPIE Advanced Lithography + Patterning will be held in San Jose on 26 Feb - 02 Mar, 2023.


  • San Jose McEnery Convention Center , 150 West San Carlos St. , San Jose, California, United States

More Details

500-1000 US Dollar (Estimated)
SPIE - The International Society for Optics and Photonics

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Please, check the official event website for possible changes, before making any traveling arrangements

Event Categories

Industry: Electronics & Electrical, Printing
Science: Engineering
Technology: Optics

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